What We Do – AML – Aligner Wafer Bonders

What We Do.

AML design and manufacture integrated Wafer Bonding systems, including the unique capability for in-situ alignment of the wafers immediately prior to bonding.

The aligner-bonder systems are readily configured to meet customer requirements and AML are receptive to discussing design modifications and to provide guidance on process development.

Innovation.

The AWB systems provide outstanding flexibility and offer the capabilities for a wide range of bonding techniques. The systems are ideally-suited to process development and also enable high-yield bonding in production.

AML worldwide.

Note: Business with Russia is currently suspended

Did you know?

AML supplies integrated Aligner Wafer Bonder equipment to a global market, with systems in operation across the USA, Asia and Europe.

Some of our clients:

Join us

No results See all results

This website uses cookies to improve your experience. By using this website you agree to our Cookie Policy.
Read more

Independent Heating

Upper and lower wafers can be heated independently to different temperatures and with different ramp rates. The differential temperature can be as high as 350°C (depending on options). This feature can be useful for processes where one wafer needs outgassing while the other one has to stay cold or for activating the getter on one wafer.

Multi stack bonding

Thick wafer bonding and multi stack wafer bonding is possible, accommodating up to 30mm thick stacks.

In-situ Chemistry

Various chemistries can be introduced into the chamber using either vapour injection system (DI water or acid) or pressure control system (gas). Wafers held in separation can be treated just before contact, for example for Copper oxide removal.

Efficient Outgassing

Large wafer separation allows more effective evacuation of the space between the wafers. All surfaces of cavities can be efficiently outgassed while the wafers are heated. It is particularly important for vacuum or gas encapsulation.

AWB Configurator - Request a Quote

- Step 1 of 4
Select your Bonder Type: AWB or ROCK
In addition to all AWB features, the ROCK has UHV capability achieved through a Cryo-Pumping System.
Layout
Select your Platform: *
AWB (10-6mbar range)
ROCK (10-8mbar range)
Click on the pictures to select AWB or ROCK
Pumping System / Vacuum Level *
CryoPumping UHV (10-8 mbar range)
Pumping System / Vacuum Level *
Turbo Molecular Pump (10-6 mbar range)
AWB Wafer / Platen Sizes *
AWB04 (for 3" and 4" Wafers)
AWB04 (for 6" Wafers)
AWB04 (for 3", 4 and 6" Wafers)
AWB08 (for 6" Wafers)
AWB08 (for 8" Wafers)
AWB08 (for 6" and 8" Wafers)
ROCK Wafer / Platen Sizes *
ROCK04 (for 3" and 4" Wafers)
ROCK04 (for 6" Wafers)
ROCK04 (for 3", 4 and 6" Wafers)
ROCK08 (for 6" Wafers)
ROCK08 (for 8" Wafers)
ROCK08 (for 6" and 8" Wafers)
Add Graphite Platens
Upper Graphite Platen
Select this if Anodic bonding is required
Chip Bonding Platens
10mm Wafer Chip Bonding
15mm Wafer Chip Bonding
25mm Wafer Chip Bonding
Other size
Only available for -04 models
Specify custom chip size (mm)
Further Options
Layout
Force Application
40 kN Manipulator - Standard
Chamber Pressure Control
Single Gas Line (Standard)
Two Gas Lines
Three Gas Lines
Vacuum Pumping System
HiPace80 Turbo + MVP-40 Roughing Pump (Standard)
HiPace80 Turbo + ACP-15 Roughing Pump (Enhanced)
HiPace300 Turbo + ACP-15 Roughing Pump (Enhanced)
Vacuum Pumping System
HiPace80 Turbo + ACP-15 Roughing Pump (Standard)
HiPace300 Turbo + ACP-15 Roughing Pump (Enhanced)
Either option is coupled with a Cryogenic Pumping System
Optional Features
RAD (radical activation)
AVI (automatic vapour injection) - required for RAD*
Lower Wafer Clamp
Triple Stack bonding tool (for Anodic bonding)
UV Bonding
Automatic alignment (manual alignment as standard)
Image Capture (for wafer backside alignment)
Near-Infrared Optics (NIR)
Final Details
Anything to add?
Layout
File Upload

Click or drag a file to this area to upload.

Max file size: 5MB. Only PNG, JPG, GIF, DOC, PDF files allowed.
Estimated required installation date: *
Further Information
Use this field to further explain your requirements
How did you hear about AML? *
Describe Other *
How can we get back to you?
We need this so we can get back to you with the Quotation and discuss your application!
Layout
Full Name *
Phone
Website / URL
Organization *
Position within the Organization *
Email *
Address
Address Line 1
Address Line 2
City
State / Province / Region
Postal Code
Country